Patent Assignment
Reel/Frame 031432/0244
Assignment of Assignor's Interest
Recorded: 2013-10-18
Pages: 5
Assignor
OKUNISHI, NAOHIKO
Executed: 2013-10-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus