Assignment of Assignor's Interest

Recorded: 2013-10-22 Pages: 3

Assignor

BEYER, DIRK

Executed: 2013-09-16

Assignee

CARL ZEISS SMS GMBH

CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY

Covered Property (1)

Method and Apparatus for Correcting Errors on a Wafer Processed by a Photolithographic Mask

Patent: 9,436,080 →

Application: 13/994,556 →

Publication: US 2014/0036243

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.