Patent Assignment
Reel/Frame 031452/0962
Assignment of Assignor's Interest
Recorded: 2013-10-22
Pages: 2
Assignors
KAWADA, HIROKI
Executed: 2013-09-13
HASEGAWA, NORIO
Executed: 2013-09-19
IKEGAMI, TORU
Executed: 2013-09-19
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Pattern Dimension Measurement Method and Charged Particle Beam Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.