Patent Assignment
Reel/Frame 031455/0818
Assignment of Assignor's Interest
Recorded: 2013-10-22
Pages: 10
Assignors
KIM, JISOO
Executed: 2010-10-28
CHIANG, CONAN
Executed: 2010-07-29
SHINAGAWA, JUN
Executed: 2010-07-29
SADJADI, S. M. REZA
Executed: 2011-09-07
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Pitch Reduction Using Oxide Spacer