Patent Assignment
Reel/Frame 031487/0362
Assignment of Assignor's Interest
Recorded: 2013-10-28
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus