Patent Assignment
Reel/Frame 031490/0578
Assignment of Assignor's Interest
Recorded: 2013-10-28
Pages: 5
Assignors
TOBIN, JEFFREY
Executed: 2013-10-21
HWANG, BERNARD L.
Executed: 2013-10-21
LAI, CANFENG
Executed: 2013-10-23
HAWRYLCHAK, LARA
Executed: 2013-10-22
LIU, WEI
Executed: 2013-10-21
SWENBERG, JOHANES
Executed: 2013-10-21
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatus for Processing Substrates Using an Ion Shield