Patent Assignment
Reel/Frame 031493/0258
Assignment of Assignor's Interest
Recorded: 2013-10-28
Pages: 5
Assignors
ISII, YOSHIHIRO
Executed: 2013-10-23
NAKANO, RYU
Executed: 2013-10-23
INOUE, NAOKI
Executed: 2013-10-23
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method For Trimming Carbon-Containing Film At Reduced Trimming Rate