Patent Assignment
Reel/Frame 031508/0478
Assignment of Assignor's Interest
Recorded: 2013-10-30
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Ground State Hydrogen Radical Sources for Chemical Vapor Deposition of Silicon-Carbon-Containing Films