Patent Assignment
Reel/Frame 031519/0918
Assignment of Assignor's Interest
Recorded: 2013-10-31
Pages: 3
Assignor
HE, ZHIAN
Executed: 2013-10-23
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Dynamic Current Distribution Control During Electroplating