Patent Assignment
Reel/Frame 031520/0183
Assignment of Assignor's Interest
Recorded: 2013-10-31
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Producing a Reflective Optical Component for an Euv Projection Exposure Apparatus and Component of This Type
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.