Patent Assignment
Reel/Frame 031528/0783
Assignment of Assignor's Interest
Recorded: 2013-11-01
Received: 2013-11-01
Pages: 2
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CT, 06810, UNITED STATES
Covered Property
(1)
Aqueous Formulations for Removing Metal Hard Mask and Post-Etch Residue with Cu/W Compatibility
Application:
61/860,385 →