Patent Application
Provisional
App. No. 61/860,385
· Confirmation No. 3627
Aqueous Formulations for Removing Metal Hard Mask and Post-Etch Residue with Cu/W Compatibility
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-08-14 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-07-31 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2013-07-31 | SPEC |
Specification | 16 | View | |
| 2013-07-31 | CLM |
Claims | 5 | View | |
| 2013-07-31 | ABST |
Abstract | 1 | View | |
| 2013-07-31 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-07-31 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Li-Min CHEN
Danbury, CT
Steven LIPPY
Danbury, CT
Attorneys & Agents of Record
Prosecution
- Customer No.
- 24239
- Docket No.
- 020732-982.1154 US PRV
- Confirmation No.
- 3627
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-11-01
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Quick Facts
- App. No.
- 61/860,385
- Filed
- 2013-07-31
External Links