Patent Assignment
Reel/Frame 031543/0267
Assignment of Assignor's Interest
Recorded: 2013-11-05
Pages: 4
Assignors
HSIEH, BOR-CHIUAN
Executed: 2013-10-29
HUANG, CHIEN-KUO
Executed: 2013-10-29
HUANG, TAI-CHUN
Executed: 2013-10-29
HSU, KUANG-YUAN
Executed: 2013-10-29
LEE, TZE-LIANG
Executed: 2013-10-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
NO. 8, LI-HSIN ROAD, VI, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
System and Method for Supplying a Precursor for an Atomic Layer Deposition (Ald) Process