Patent Assignment
Reel/Frame 031546/0646
Assignment of Assignor's Interest
Recorded: 2013-11-05
Pages: 8
Assignors
NISKANEN, ANTTI J.
Executed: 2013-10-31
CHEN, SHANG
Executed: 2013-10-30
PORE, VILJAMI
Executed: 2013-10-30
FUKAZAWA, ATSUKI
Executed: 2013-10-24
FUKUDA, HIDEAKI
Executed: 2013-10-24
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
Application:
14/062,328 →
Publication:
US 2014/0273531