Assignment of Assignor's Interest

Recorded: 2013-10-29 Pages: 2

Assignors

OTA, YOSUKE

Executed: 2013-10-16

HIROSE, YOSHIRO

Executed: 2013-10-16

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 1018980, JAPAN

Covered Property (1)

Method of Manufacturing Semiconductor Device, Substrate Processing Method and Substrate Processing Apparatus

Patent: 9,123,530 →

Application: 14/006,819 →

Publication: US 2014/0051261

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.