Patent Assignment
Reel/Frame 031587/0162
Assignment of Assignor's Interest
Recorded: 2013-11-12
Pages: 4
Assignor
DEHE, ALFONS
Executed: 2013-10-24
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-12, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
Device with MEMS Structure and Ventilation Path in Support Structure