Patent Assignment
Reel/Frame 031591/0916
Assignment of Assignor's Interest
Recorded: 2013-11-13
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
NO. 8, LI-HSIN ROAD 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Plasma Generation and Pulsed Plasma Etching