Patent Assignment
Reel/Frame 031593/0817
Assignment of Assignor's Interest
Recorded: 2013-11-13
Pages: 8
Assignors
NISHIMURA, EIICHI
Executed: 2013-10-29
KUSHIBIKI, MASATO
Executed: 2013-10-28
SONE, TAKASHI
Executed: 2013-10-28
SHIMIZU, AKITAKA
Executed: 2013-10-23
YAMASHITA, FUMIKO
Executed: 2013-10-29
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Etching Copper Layer and Mask