Patent Assignment
Reel/Frame 031602/0548
Assignment of Assignor's Interest
Recorded: 2013-11-14
Pages: 3
Assignee
SEMEQUIP, INC.
34 SULLIVAN ROAD, NORTH BILLERICA, MASSACHUSETTS, 01862-2000
Covered Property
(1)
Ion Implantation Device and a Method of Semiconductor Manufacturing by the Implantation of Boron Hydride Cluster Ions
Application:
14/073,565 →
Publication:
US 2014/0061816