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App. No. 14/073,565 · Confirmation No. 7945

ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF BORON HYDRIDE CLUSTER IONS

Applicant: SemEquip, Inc.
Expressly Abandoned -- During Examination View Publication ↗
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2014-06-26 ABN.EXPRESS Internal document noting that an Express Abandonment request has been processed 2 View
2014-06-26 INTV.SUM.EX Examiner initiated interview summary (PTOL-413B) 1 View
2014-06-26 ABN Abandonment 1 View
2014-06-13 EABN Letter Express Abandonment of the application 2 View
2014-06-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-03-06 NTC.PUB Notice of Publication 1 View
2013-12-13 RFND Refund Denied 3 View
2013-11-26 WFEE Fee Worksheet (SB06) 1 View
2013-11-26 APP.FILE.REC Filing Receipt 3 View
2013-11-26 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2013-11-19 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2013-11-19 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2013-11-19 FOR Foreign Reference 116 View
2013-11-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-11-15 A.PE Preliminary Amendment 1 View
2013-11-15 SPEC Specification 1 View
2013-11-15 CLM Claims 6 View
2013-11-15 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2013-11-15 ADS Application Data Sheet 6 View
2013-11-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-11-15 WFEE Fee Worksheet (SB06) 1 View
2013-11-06 ADS Application Data Sheet 6 View
2013-11-06 SPEC Specification 41 View
2013-11-06 CLM Claims 6 View
2013-11-06 ABST Abstract 1 View
2013-11-06 DRW Drawings-only black and white line drawings 36 View
2013-11-06 WFEE Fee Worksheet (SB06) 2 View
2013-11-06 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
14/073,565
Filed
2013-11-06
Pub. No.
US20140061816A1
Art Unit
2881