Patent Assignment
Reel/Frame 031611/0011
Assignment of Assignor's Interest
Recorded: 2013-11-15
Pages: 4
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO 602-8585, JAPAN
Covered Property
(1)
Thermal Processing Apparatus and Thermal Processing Method for Heating Substrate by Light Irradiation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.