Patent Assignment
Reel/Frame 031614/0233
Assignment of Assignor's Interest
Recorded: 2013-11-15
Pages: 4
Assignor
FOX, KEITH
Executed: 2013-11-11
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Method for Deposition of Conformal Films with Catalysis Assisted Low Temperature Cvd