Patent Assignment
Reel/Frame 031621/0603
Assignment of Assignor's Interest
Recorded: 2013-11-18
Pages: 14
Assignors
GODET, LUDOVIC
Executed: 2013-11-15
MILLER, TIMOTHY
Executed: 2013-11-04
PAPASOULIOTIS, GEORGE
Executed: 2013-10-23
SINGH, VIKRAM
Executed: 2013-11-08
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Enhanced Etch and Deposition Profile Control Using Plasma Sheath Engineering