Patent Assignment
Reel/Frame 031623/0130
Assignment of Assignor's Interest
Recorded: 2013-11-18
Pages: 4
Assignors
REICH, JUERGEN
Executed: 2013-10-31
AMSDEN, CHARLES
Executed: 2013-11-06
ZHANG, JIAYAO
Executed: 2013-10-31
WOLTERS, CHRISTIAN
Executed: 2013-10-31
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Large Particle Detection for Multi-Spot Surface Scanning Inspection Systems