Patent Assignment
Reel/Frame 031637/0718
Assignment of Assignor's Interest
Recorded: 2013-11-20
Pages: 2
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Charged Particle Beam Apparatus and Electrostatic Chuck Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.