Patent Assignment
Reel/Frame 031639/0663
Assignment of Assignor's Interest
Recorded: 2013-11-20
Pages: 2
Assignor
ISHIBASHI, KIYOTAKA
Executed: 2013-11-12
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Device