Patent Assignment
Reel/Frame 031648/0980
Assignment of Assignor's Interest
Recorded: 2013-11-21
Pages: 2
Assignor
PANDEV, STILIAN IVANOV
Executed: 2013-05-06
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Measurement Recipe Optimization Based On Spectral Sensitivity And Process Variation