Patent Assignment
Reel/Frame 031651/0847
Assignment of Assignor's Interest
Recorded: 2013-11-21
Pages: 6
Assignors
VERHAVERBEKE, STEVEN
Executed: 2013-11-14
CHEN, HAN-WEN
Executed: 2013-11-15
GOUK, ROMAN
Executed: 2013-11-20
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Stiction-Free Drying Process with Contaminant Removal for High-Aspect Ratio Semiconductor Device Structures