Patent Assignment
Reel/Frame 031655/0336
Assignment of Assignor's Interest
Recorded: 2013-11-22
Pages: 6
Assignors
CHIOU, TSANN-BIM
Executed: 2013-11-12
CHEN, ALEK CHI-HENG
Executed: 2013-11-12
DUSA, MIRCEA
Executed: 2013-08-16
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method of Preparing a Pattern, Method of Forming a Mask Set, Device Manufacturing Method and Computer Program