Patent Assignment
Reel/Frame 031658/0143
Assignment of Assignor's Interest
Recorded: 2013-11-22
Pages: 4
Assignors
YAO, HSIN-CHIEH
Executed: 2013-11-13
LEE, CHUNG-JU
Executed: 2013-11-13
WU, YUNG-HSU
Executed: 2013-11-13
BAO, TIEN-I
Executed: 2013-11-13
SHUE, SHAU-LIN
Executed: 2013-11-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
A Method of Double Patterning Lithography Process Using Plurality of Mandrels for Integrated Circuit Applications