Patent Assignment
Reel/Frame 031670/0277
Assignment of Assignor's Interest
Recorded: 2013-11-25
Pages: 3
Assignor
TABUCHI, ATSUHIKO
Executed: 2013-09-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Apparatus and Control Method