Patent Assignment
Reel/Frame 031680/0817
Assignment of Assignor's Interest
Recorded: 2013-11-26
Pages: 3
Assignor
FUKAZAWA, ATSUKI
Executed: 2013-11-26
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Forming Conformal Nitrided, Oxidized, or Carbonized Dielectric Film by Atomic Layer Deposition