Patent Assignment
Reel/Frame 031687/0669
Assignment of Assignor's Interest
Recorded: 2013-11-27
Pages: 3
Assignors
KANG, HU
Executed: 2013-11-21
QIAN, JUN
Executed: 2013-11-25
LAVOIE, ADRIEN
Executed: 2013-11-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Chamber Undercoat Preparation Method for Low Temperature Ald Films