Patent Assignment
Reel/Frame 031697/0526
Assignment of Assignor's Interest
Recorded: 2013-12-02
Pages: 2
Assignor
LIN, SU-HORNG
Executed: 2013-11-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Mechanisms for Supplying Process Gas into Wafer Process Apparatus