Patent Assignment
Reel/Frame 031712/0714
Assignment of Assignor's Interest
Recorded: 2013-12-04
Pages: 6
Assignors
IWAMOTO, HAYATO
Executed: 2013-06-17
HAGIMOTO, YOSHIYA
Executed: 2013-07-22
TETSUKA, TOMOKI
Executed: 2013-07-30
SHIMOMURA, SHINICHIRO
Executed: 2013-06-12
MINAMI, TERUOMI
Executed: 2013-06-12
SAKURAI, HIROKI
Executed: 2013-06-12
MARUYAMA, HIROTAKA
Executed: 2013-06-12
KAWABUCHI, YOSUKE
Executed: 2013-06-12
TANAKA, HIROSHI
Executed: 2013-06-13
Assignees
SONY CORPORATION
1-7-1, KONAN, MINATO-KU, TOKYO-TO, JAPAN
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing Apparatus, and Storage Medium