Patent Assignment
Reel/Frame 031715/0245
Assignment of Assignor's Interest
Recorded: 2013-12-04
Pages: 3
Assignors
EBATA, YOSHISADA
Executed: 2013-11-07
MATSUI, SHIGERU
Executed: 2013-11-08
HASEGAWA, NORIO
Executed: 2013-11-19
KAKUTA, KAZUYUKI
Executed: 2013-11-13
ONOZUKA, TOSHIHIKO
Executed: 2013-11-11
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME,, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Diffraction Grating Manufacturing Method, Spectrophotometer, and Semiconductor Device Manufacturing Method
Application:
14/118,375 →
Publication:
US 2014/0092384
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.