Patent Assignment
Reel/Frame 031716/0940
Assignment of Assignor's Interest
Recorded: 2013-12-04
Pages: 5
Assignors
CHANG, YU-SHENG
Executed: 2013-11-21
LEE, CHUNG-JU
Executed: 2013-11-25
TSAI, CHENG-HSIUNG
Executed: 2013-11-21
WU, YUNG-HSU
Executed: 2013-11-21
LEE, HSIANG-HUAN
Executed: 2013-11-26
CHEN, HAI-CHING
Executed: 2013-11-25
SHIEH, MING-FENG
Executed: 2013-11-26
BAO, TIEN-I
Executed: 2013-11-25
LIU, RU-GUN
Executed: 2013-11-26
GAU, TSAI-SHENG
Executed: 2013-11-26
SHUE, SHAU-LIN
Executed: 2013-11-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (TSMC)
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Lithography Using High Selectivity Spacers for Pitch Reduction