Patent Assignment
Reel/Frame 031722/0673
Assignment of Assignor's Interest
Recorded: 2013-12-05
Pages: 2
Assignors
HUANG, TSUNG-MIN
Executed: 2013-12-02
LEE, CHUNG-JU
Executed: 2013-12-02
WU, YUNG-HSU
Executed: 2013-12-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Trench Formation using Horn Shaped Spacer