Patent Assignment
Reel/Frame 031724/0578
Assignment of Assignor's Interest
Recorded: 2013-12-05
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System and Method for Learning and/or Optimizing Manufacturing Processes