Patent Assignment
Reel/Frame 031726/0323
Assignment of Assignor's Interest
Recorded: 2013-12-05
Pages: 12
Assignors
UMEMOTO, MASAO
Executed: 2013-11-15
SONE, TADAKAZU
Executed: 2013-11-15
AIZAWA, HIDEO
Executed: 2013-11-15
KOSUGE, RYUICHI
Executed: 2013-11-15
ERIGUCHI, MASAAKI
Executed: 2013-11-15
Assignee
EBARA CORPORATION
11-1, HANEDA, ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method