Patent Assignment
Reel/Frame 031749/0101
Assignment of Assignor's Interest
Recorded: 2013-12-10
Pages: 3
Assignor
NAMBA, HIROMITSU
Executed: 2013-12-06
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Cleaning Jig and Cleaning Method for Cleaning Substrate Processing Apparatus, and Substrate Processing System