Patent Assignment
Reel/Frame 031790/0562
Assignment of Assignor's Interest
Recorded: 2013-12-16
Pages: 5
Assignors
OGIHARA, TSUTOMU
Executed: 2013-10-31
UEDA, TAKAFUMI
Executed: 2013-10-31
TACHIBANA, SEIICHIRO
Executed: 2013-10-31
TANEDA, YOSHINORI
Executed: 2013-10-31
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Compositon for Forming Metal Oxide-Containing Film and Patterning Process