Patent Assignment
Reel/Frame 031791/0124
Assignment of Assignor's Interest
Recorded: 2013-12-16
Pages: 3
Assignor
SINGH, HARMEET
Executed: 2013-12-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Processing Apparatus and Component Thereof Including an Optical Fiber for Determining a Temperature Thereof