Patent Assignment
Reel/Frame 031803/0320
Assignment of Assignor's Interest
Recorded: 2013-12-17
Pages: 8
Assignors
JI, CHUNHAI
Executed: 2013-05-15
REDDY, SIRISH
Executed: 2013-05-15
WANG, TUO
Executed: 2013-12-16
SRIRAM, MANDYAM
Executed: 2013-08-05
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Carbon Deposition-Etch-Ash Gap Fill Process