Patent Assignment
Reel/Frame 031819/0195
Assignment of Assignor's Interest
Recorded: 2013-12-19
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Carrier Head Having Retainer Ring, Polishing System Including the Carrier Head and Method of Using the Polishing System