Patent Assignment
Reel/Frame 031829/0104
Assignment of Assignor's Interest
Recorded: 2013-12-20
Pages: 5
Assignors
TERASAKI, TADASHI
Executed: 2013-10-09
NAKAYAMA, MASANORI
Executed: 2013-10-15
TAKESHITA, MITSUNORI
Executed: 2013-10-10
FUNAKI, KATSUNORI
Executed: 2013-10-09
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.