Patent Assignment
Reel/Frame 031830/0328
Assignment of Assignor's Interest
Recorded: 2013-12-20
Pages: 4
Assignors
UEDA, HIROKAZU
Executed: 2013-12-17
OKA, MASAHIRO
Executed: 2013-12-17
HORIGOME, MASAHIRO
Executed: 2013-12-17
KOBAYASHI, YUUKI
Executed: 2013-12-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Doping Apparatus and Plasma Doping Method