Patent Assignment
Reel/Frame 031834/0960
Assignment of Assignor's Interest
Recorded: 2013-12-20
Pages: 3
Assignee
CYMER, LLC
17075 THORNMINT COURT, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
System, Method and Apparatus for Laser Produced Plasma Extreme Ultraviolet Chamber with Hot Walls and Cold Collector Mirror
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.