Patent Assignment
Reel/Frame 031857/0450
Assignment of Assignor's Interest
Recorded: 2013-12-30
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Device and Method for Positioning and Calibrating a Wafer Transportation Apparatus