Patent Assignment
Reel/Frame 031862/0571
Assignment of Assignor's Interest
Recorded: 2013-12-31
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Manganese Metal Film Forming Method, Processing System, Electronic Device Manufacturing Method and Electronic Device